Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices
A technical guide to nanoparticle engineering for chemical-mechanical planarization in next-generation nanodevice fabrication.
About This Book
This book examines nanoparticle engineering approaches used in chemical-mechanical planarization processes.
It addresses the fabrication requirements for next-generation nanodevices.
The content focuses on materials and methods relevant to advanced semiconductor manufacturing.
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