Control of Defects in Aluminum Gallium Nitride ((Al)GaN) Films on Grown Aluminum Nitride (AlN) Substrates
This specialized work addresses defect control in aluminum gallium nitride films grown on aluminum nitride substrates. Centered on semiconductor materials and thin-film systems, it provides a focused resource for readers exploring AlGaN, AlN, crystalline defects, and related materials science research.
About This Book
This work focuses on the control of defects in aluminum gallium nitride, or (Al)GaN, films.
The films are grown on aluminum nitride, or AlN, substrates.
Its subject lies within semiconductor materials, thin-film growth, and the study of crystalline defects.
The book may be relevant to readers seeking focused technical material on AlGaN and AlN-based systems.
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