MEMS Pressure Sensors: Fabrication and Process Optimization
MEMS Pressure Sensors: Fabrication and Process Optimization presents a focused examination of microelectromechanical pressure sensors and the processes used to fabricate them. Suitable for students, researchers, and engineering professionals, it offers a subject-centered resource on sensor development, manufacturing considerations, and process optimization.
About This Book
MEMS Pressure Sensors: Fabrication and Process Optimization focuses on the development of microelectromechanical pressure-sensing devices.
The book addresses fabrication and the optimization of processes used in producing MEMS pressure sensors.
It may interest students, researchers, engineers, and professionals seeking a focused introduction to sensor manufacturing and microsystems technology.
Reviews
No reviews yet. Be the first to review this book!