Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science)
by M.R. Oliver
A technical reference exploring chemical-mechanical planarization processes and considerations for semiconductor materials in manufacturing.
About This Book
This book addresses chemical-mechanical planarization techniques used in semiconductor manufacturing.
It covers fundamental principles and process considerations for planarizing semiconductor materials.
The content is presented as part of the Springer Series in Materials Science.
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