Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science, 69)
by M.R. Oliver
This specialized reference examines chemical-mechanical planarization of semiconductor materials from a materials science and engineering perspective. It offers readers a focused foundation in a key semiconductor processing topic and serves as a technical resource for academic study, research, and professional consultation.
About This Book
Chemical-Mechanical Planarization of Semiconductor Materials presents a focused treatment of planarization within semiconductor materials processing.
The book explores the chemical and mechanical aspects of the subject from a materials science and engineering perspective.
It is intended as a technical reference for readers studying semiconductor manufacturing, surface processing, and related materials topics.
Published as part of the Springer Series in Materials Science, this volume provides a specialized resource for academic and professional use.
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