Advanced MEMS/NEMS Fabrication and Sensors
Advanced MEMS/NEMS Fabrication and Sensors examines the fabrication of microelectromechanical and nanoelectromechanical systems alongside related sensor technologies. It offers a focused technical resource for readers interested in the processes, devices, and applications that define MEMS and NEMS engineering.
About This Book
Advanced MEMS/NEMS Fabrication and Sensors focuses on microelectromechanical and nanoelectromechanical systems.
The book addresses fabrication methods relevant to MEMS and NEMS devices.
It also covers sensor technologies associated with these miniaturized systems.
This title is suited to readers seeking technical coverage of advanced fabrication and sensing applications.
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