Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, Gaithersburg MD, USA (AIP Conference Proceedings)
by D.G. Seiler, A.C. Diebold, W.M. Bullis, T.J. Shaffner, R. Mcdonald, E.J. Walters
Conference proceedings covering characterization and metrology methods for ULSI semiconductor technology, held at NIST in 1998.
About This Book
This volume compiles papers from the 1998 International Conference on Characterization and Metrology for ULSI Technology.
The conference was held at the National Institute of Standards and Technology in Gaithersburg, Maryland.
Topics focus on measurement techniques and standards relevant to ultra-large-scale integration semiconductor manufacturing.
Editors include D.G. Seiler, A.C. Diebold, W.M. Bullis, T.J. Shaffner, R. Mcdonald, and E.J. Walters.
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