Chemical-Mechanical Planarization: Volume 867: Integration, Technology and Reliability (MRS Proceedings)
by E. C. Johns, A. Kumar, J. A. Lee, Y. S. Obeng, I. Vos
Chemical-Mechanical Planarization examines integration, technology, and reliability within this specialized area of materials and engineering research. As Volume 867 of MRS Proceedings, it offers a proceedings-based resource for readers interested in the technical study of chemical-mechanical planarization.
About This Book
Chemical-Mechanical Planarization presents technical material focused on a key process in materials and device manufacturing.
This volume addresses integration, technology, and reliability related to chemical-mechanical planarization.
Published as Volume 867 of MRS Proceedings, it brings together contributions from E. C. Johns, A. Kumar, J. A. Lee, Y. S. Obeng, and I. Vos.
The book is suited to readers seeking proceedings-based coverage of research and technical developments in this specialized engineering field.
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