From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications
From MEMS to Bio-MEMS and Bio-NEMS explores manufacturing techniques and applications across microsystems, biological microsystems, and biological nanosystems. Marc J. Madou’s technical reference offers a focused introduction to technologies linking engineering and biological applications.
About This Book
From MEMS to Bio-MEMS and Bio-NEMS focuses on microscale and nanoscale systems and their relationship to biological applications.
The book addresses manufacturing techniques associated with MEMS, Bio-MEMS, and Bio-NEMS.
It also examines applications of these technologies, connecting fabrication methods with their practical uses.
Written by Marc J. Madou, this is a technical reference for readers studying engineering, biotechnology, and related fields.
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