Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications
by Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, Arthur Sherman
Explore the principles and characteristics of atomic layer deposition, along with its role in nanotechnology applications. Written by Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman, this focused reference introduces a specialized subject in science and engineering.
About This Book
Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications introduces the subject of atomic layer deposition through its core principles and defining characteristics.
The book focuses on atomic layer deposition as a technology relevant to nanotechnology applications.
Written by Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman, this title provides a focused reference on the topic.
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