Silicon Processing for the VLSI Era, Vol. 2: Process Integration
by Stanley Wolf, Richard N. Tauber
Silicon Processing for the VLSI Era, Volume 2: Process Integration by Stanley Wolf and Richard N. Tauber explores the vital techniques for integrating silicon processes in semiconductor production. This essential text details the steps to achieve efficient and reliable VLSI devices, making it a cornerstone for engineers and technologists in electronics manufacturing.
About This Book
Silicon Processing for the VLSI Era, Volume 2, focuses on process integration, a key aspect of semiconductor fabrication. Authored by Stanley Wolf and Richard N. Tauber, it provides detailed insights into combining various processing steps to create functional VLSI devices.
The book covers the integration of processes essential for modern electronics, emphasizing reliability and efficiency in silicon-based technologies. It serves as a comprehensive resource for professionals in the field.
With its emphasis on practical applications, this volume builds on foundational knowledge from earlier works, offering a structured approach to understanding complex integration challenges in VLSI manufacturing.
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