Tribology In Chemical-Mechanical Planarization
Tribology in Chemical-Mechanical Planarization presents a focused examination of the relationship between tribological principles and chemical-mechanical planarization. Written by Hong Liang and David Craven, this specialized technical reference connects engineering, chemistry, and materials science for readers interested in this field.
About This Book
Tribology in Chemical-Mechanical Planarization focuses on the relationship between tribology and chemical-mechanical planarization, a specialized subject at the intersection of engineering, chemistry, and materials science.
The book examines its topic through the field of tribology, which concerns the interactions of surfaces in relative motion. Its emphasis is reflected in the connection between tribological principles and planarization processes.
Written by Hong Liang and David Craven, this volume is suited to readers seeking a focused reference on the technical subject named in its title.
Its specialized scope makes it relevant to academic, research, and professional interest in chemical-mechanical planarization and related engineering disciplines.
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