Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology and Applications (Materials Science and Process Technology Series)
by Werner Kern
Handbook of Semiconductor Wafer Cleaning Technology offers a focused reference on the science, technology, and applications of cleaning semiconductor wafers. Written by Werner Kern, it places this specialized subject within the broader fields of materials science, semiconductor manufacturing, and process technology.
About This Book
Handbook of Semiconductor Wafer Cleaning Technology presents a focused treatment of wafer cleaning within semiconductor manufacturing.
The book addresses the science and technology associated with cleaning semiconductor wafers.
It also considers applications of wafer cleaning processes in the broader context of materials science and process technology.
Written by Werner Kern, this reference belongs to the Materials Science and Process Technology series.
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