Microelectronic Applications of Chemical Mechanical Planarization
by Yuzhuo Li
This technical volume explores chemical mechanical planarization and its applications in microelectronics. Written by Yuzhuo Li, it provides a focused reference for readers interested in the engineering, materials, and technology considerations surrounding this specialized process.
About This Book
Microelectronic Applications of Chemical Mechanical Planarization examines chemical mechanical planarization in the context of microelectronics.
The book focuses on the relationship between this specialized process and its applications in electronic technology, offering a subject-specific resource for technical readers.
Written by Yuzhuo Li, this volume is suited to readers studying or working with microelectronic engineering, planarization, and related materials and process technologies.
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