Chemical Mechanical Planarization of Microelectronic Materials
by Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
Chemical Mechanical Planarization of Microelectronic Materials presents a focused examination of planarization as it relates to microelectronic materials. Combining chemical and mechanical perspectives, the book explores a specialized engineering and materials science subject relevant to understanding surface processing in microelectronics.
About This Book
Chemical Mechanical Planarization of Microelectronic Materials focuses on the principles and practice of chemical mechanical planarization in the context of microelectronics.
The book addresses the interaction of chemical processes and mechanical action involved in planarizing material surfaces.
Its subject matter connects materials science, engineering, and microelectronic manufacturing.
Written by Joseph M. Steigerwald, Shyam P. Murarka, and Ronald J. Gutmann, this volume provides a focused resource on a specialized area of microelectronic materials processing.
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