Chemical Mechanical Planarization of Microelectronic Materials
by Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
Technical reference examining chemical mechanical planarization methods, process variables, and equipment for microelectronic materials and semiconductor fabrication.
About This Book
This book addresses chemical mechanical planarization techniques used in microelectronics manufacturing.
It covers fundamental principles, process variables, and equipment considerations for planarization of semiconductor materials.
The text provides guidance relevant to process engineers and researchers working with microelectronic device fabrication.
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