MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
by Tai-Ran Hsu
MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering presents a focused examination of microelectromechanical systems and microsystems. With attention to design, manufacture, and nanoscale engineering, it offers readers a foundation for understanding the technologies and engineering considerations involved in developing these increasingly important systems.
About This Book
MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering focuses on the design and manufacture of microelectromechanical systems and microsystems.
The book addresses engineering at the nanoscale, presenting the subject through the connected perspectives of design, production, and technology.
It is intended for readers seeking a focused introduction to the engineering concepts associated with MEMS and microsystems.
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