Radio-Frequency Capacitive Discharges
by Mikhail N. Shneider, Yuri P. Raizer, Nikolai A. Yatsenko
This reference explores the physics, modeling, and applications of radio-frequency capacitive discharges for plasma research and engineering.
About This Book
Radio-Frequency Capacitive Discharges presents the fundamental principles and practical aspects of RF capacitive discharge systems.
The text covers the physical mechanisms, electrical characteristics, and modeling approaches used in this field.
Readers will find discussions on plasma generation, discharge stability, and relevant experimental techniques.
The book is intended for researchers and engineers working with radio-frequency plasma technologies.
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