Surface Metrology for Micro- and Nanofabrication (Micro and Nano Technologies)
by Wei Gao
Surface Metrology for Micro- and Nanofabrication presents a specialized examination of surface measurement and characterization for advanced manufacturing. Written by Wei Gao and published in the Micro and Nano Technologies series, this technical reference explores metrology’s role in micro- and nanoscale fabrication.
About This Book
Surface Metrology for Micro- and Nanofabrication focuses on the measurement and characterization of surfaces used in micro- and nanofabrication.
The book addresses surface metrology in the context of small-scale manufacturing and technological development.
As part of the Micro and Nano Technologies series, it is intended for readers seeking a technical treatment of surface measurement at micro- and nanoscale dimensions.
Written by Wei Gao, this volume provides a specialized reference for the study of surface metrology and its role in advanced fabrication.
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